Open AccessLocalized GaAs Etching with Acidic Hydrogen Peroxide Solutions
Author(s) -
Don W. Shaw
Publication year - 1981
Publication title -
journal of the electrochemical society
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.258
H-Index - 271
eISSN - 1945-7111
pISSN - 0013-4651
DOI - 10.1149/1.2127524
Subject(s) - etching (microfabrication) , hydrogen peroxide , anisotropy , isotropy , isotropic etching , materials science , engraving , hydrogen , chemical engineering , chemistry , nanotechnology , composite material , optics , organic chemistry , layer (electronics) , physics , engineering
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