Open AccessDeformation of Silicon Wafers by Thermal Oxidation
Author(s) -
Yutaka Yoriume
Publication year - 1982
Publication title -
journal of the electrochemical society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.258
H-Index - 271
eISSN - 1945-7111
pISSN - 0013-4651
DOI - 10.1149/1.2124372
Subject(s) - wafer , silicon , thermal oxidation , materials science , thermal expansion , rapid thermal processing , oxide , deformation (meteorology) , thermal , composite material , optoelectronics , metallurgy , thermodynamics , physics
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