Open AccessSemiconductor Electrodes: 52. Photoelectron Spectroscopic Determination of the Structure of Thin Platinum Silicide Layers Formed on Si(100) and Si(111) for Use as Electrodes
Author(s) -
Gregory A. Hope,
F.R. F. FAN,
Allen J. Bard
Publication year - 1983
Publication title -
journal of the electrochemical society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.258
H-Index - 271
eISSN - 1945-7111
pISSN - 0013-4651
DOI - 10.1149/1.2120016
Subject(s) - x ray photoelectron spectroscopy , platinum , silicide , analytical chemistry (journal) , annealing (glass) , silicon , sputtering , materials science , thin film , electrode , auger electron spectroscopy , layer (electronics) , chemistry , metallurgy , chemical engineering , catalysis , nanotechnology , engineering , biochemistry , physics , chromatography , nuclear physics
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