Open AccessChemical Etching of GaAs
Author(s) -
Sadao Adachi,
Kunishige Oe
Publication year - 1984
Publication title -
journal of the electrochemical society
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.258
H-Index - 271
eISSN - 1945-7111
pISSN - 0013-4651
DOI - 10.1149/1.2115492
Subject(s) - etching (microfabrication) , limiting , aqueous solution , materials science , isotropic etching , surface finish , optoelectronics , surface roughness , dry etching , nanotechnology , analytical chemistry (journal) , chemical engineering , chemistry , composite material , layer (electronics) , chromatography , mechanical engineering , engineering
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