Open AccessElectrical Characteristics of Tantalum Pentoxide‐Silicon Dioxide‐Silicon Structures
Author(s) -
S. Seki,
Takashi Unagami,
Bunjiro Tsujiyama
Publication year - 1985
Publication title -
journal of the electrochemical society
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.258
H-Index - 271
eISSN - 1945-7111
pISSN - 0013-4651
DOI - 10.1149/1.2113761
Subject(s) - tantalum pentoxide , materials science , silicon , silicon dioxide , dielectric , charge density , tantalum , pentoxide , condensed matter physics , insulator (electricity) , optoelectronics , composite material , vanadium , metallurgy , physics , quantum mechanics
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