Open AccessDopant Selective Photoelectrochemical Etching of GaAs Homostructures
Author(s) -
Reena Khare,
Evelyn L. Hu
Publication year - 1991
Publication title -
journal of the electrochemical society
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.258
H-Index - 271
eISSN - 1945-7111
pISSN - 0013-4651
DOI - 10.1149/1.2085818
Subject(s) - selectivity , dopant , substrate (aquarium) , doping , etching (microfabrication) , materials science , etch pit density , electrolyte , analytical chemistry (journal) , chemistry , optoelectronics , nanotechnology , electrode , chromatography , catalysis , organic chemistry , oceanography , layer (electronics) , geology
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