Open AccessInsight into Gate Oxide Thinning
Author(s) -
P. Bellutti,
A. Lui
Publication year - 1994
Publication title -
journal of the electrochemical society
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 1.258
H-Index - 271
eISSN - 1945-7111
pISSN - 0013-4651
DOI - 10.1149/1.2054805
Subject(s) - thinning , oxide , materials science , gate oxide , scanning electron microscope , substrate (aquarium) , silicon , doping , optoelectronics , analytical chemistry (journal) , chemistry , composite material , electrical engineering , metallurgy , transistor , engineering , ecology , oceanography , chromatography , voltage , geology , biology
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