Open AccessPyrolysis Mechanism of Silanes, Difluorosilane, and Their Mixtures
Author(s) -
Jae Hyun Han,
ShiWoo Rhee,
Sang Heup Moon
Publication year - 1996
Publication title -
journal of the electrochemical society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.258
H-Index - 271
eISSN - 1945-7111
pISSN - 0013-4651
DOI - 10.1149/1.1836938
Subject(s) - silanes , pyrolysis , chemistry , isothermal process , reaction mechanism , mechanism (biology) , chemical engineering , organic chemistry , thermodynamics , catalysis , silane , philosophy , physics , epistemology , engineering
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