Open AccessControl of Sidewall Angles Using UV LEDs during Wet Etching of GaAs
Author(s) -
Hee Taek Yi,
Madhavi Thakurdesai,
M. A. Parker
Publication year - 2004
Publication title -
electrochemical and solid-state letters
Language(s) - English
Resource type - Journals
eISSN - 1944-8775
pISSN - 1099-0062
DOI - 10.1149/1.1814592
Subject(s) - materials science , light emitting diode , optoelectronics , ultraviolet , etching (microfabrication) , diode , dissolution , optics , laser , isotropic etching , ultraviolet light , nanotechnology , chemical engineering , physics , layer (electronics) , engineering
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom