Open AccessQuality Improvement in LPCVD Silicon Nitrides by Anodic and Rapid Thermal Oxidations
Author(s) -
YenPo Lin,
JennGwo Hwu
Publication year - 2004
Publication title -
electrochemical and solid-state letters
Language(s) - English
Resource type - Journals
eISSN - 1944-8775
pISSN - 1099-0062
DOI - 10.1149/1.1664053
Subject(s) - materials science , chemical vapor deposition , dangling bond , anode , thermal oxidation , chemical engineering , stoichiometry , electrochemistry , oxygen , oxygen evolution , inorganic chemistry , silicon , nanotechnology , metallurgy , organic chemistry , electrode , chemistry , engineering
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