Open AccessLow Temperature CVD of Pb(Zr,Ti)O[sub 3] Using Pb(tmhd)[sub 2], Zr(dmae)[sub 4], and Ti(dmae)[sub 4]
Author(s) -
DaeHwan Kim,
Woo-Young Yang,
ShiWoo Rhee
Publication year - 2003
Publication title -
journal of the electrochemical society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.258
H-Index - 271
eISSN - 1945-7111
pISSN - 0013-4651
DOI - 10.1149/1.1584441
Subject(s) - chemical vapor deposition , metalorganic vapour phase epitaxy , materials science , analytical chemistry (journal) , thin film , nitrogen , atmospheric temperature range , dissociation (chemistry) , substrate (aquarium) , chemistry , composite material , epitaxy , nanotechnology , organic chemistry , physics , oceanography , layer (electronics) , meteorology , geology
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