Precursors for Deposition of Strontium Bismuth Tantalate Films by Direct Liquid Injection-Metallorganic Chemical Vapor Deposition | Zendy

SangWoo Kang | Zendy; KeeJeong Yang | Zendy; Kijung Yong | Zendy; ShiWoo Rhee | Zendy

Open Access

Precursors for Deposition of Strontium Bismuth Tantalate Films by Direct Liquid Injection-Metallorganic Chemical Vapor Deposition

Author(s) -

SangWoo Kang,

KeeJeong Yang,

Kijung Yong,

ShiWoo Rhee

Publication year - 2002

Publication title -

journal of the electrochemical society

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 1.258

H-Index - 271

eISSN - 1945-7111

pISSN - 0013-4651

DOI - 10.1149/1.1421604

Subject(s) - tantalate , chemical vapor deposition , thermogravimetric analysis , thin film , analytical chemistry (journal) , materials science , fourier transform infrared spectroscopy , metalorganic vapour phase epitaxy , differential scanning calorimetry , combustion chemical vapor deposition , ferroelectricity , mineralogy , carbon film , dielectric , chemical engineering , chemistry , nanotechnology , organic chemistry , epitaxy , physics , optoelectronics , layer (electronics) , engineering , thermodynamics

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