Open AccessPrecursors for Deposition of Strontium Bismuth Tantalate Films by Direct Liquid Injection-Metallorganic Chemical Vapor Deposition
Author(s) -
SangWoo Kang,
KeeJeong Yang,
Kijung Yong,
ShiWoo Rhee
Publication year - 2002
Publication title -
journal of the electrochemical society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.258
H-Index - 271
eISSN - 1945-7111
pISSN - 0013-4651
DOI - 10.1149/1.1421604
Subject(s) - tantalate , chemical vapor deposition , thermogravimetric analysis , thin film , analytical chemistry (journal) , materials science , fourier transform infrared spectroscopy , metalorganic vapour phase epitaxy , differential scanning calorimetry , combustion chemical vapor deposition , ferroelectricity , mineralogy , carbon film , dielectric , chemical engineering , chemistry , nanotechnology , organic chemistry , epitaxy , physics , optoelectronics , layer (electronics) , engineering , thermodynamics