Open AccessMetallorganic Chemical Vapor Deposition of Pb(Zr, Ti)O[sub 3] Films Using a Single Mixture of Metallorganic Precursors
Author(s) -
DaeHwan Kim,
Jeong Seok Na,
ShiWoo Rhee
Publication year - 2001
Publication title -
journal of the electrochemical society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.258
H-Index - 271
eISSN - 1945-7111
pISSN - 0013-4651
DOI - 10.1149/1.1397317
Subject(s) - metalorganic vapour phase epitaxy , chemical vapor deposition , substrate (aquarium) , thin film , materials science , tetrahydrofuran , inorganic chemistry , electrochemistry , analytical chemistry (journal) , deposition (geology) , chemical engineering , chemistry , solvent , epitaxy , electrode , nanotechnology , organic chemistry , layer (electronics) , oceanography , geology , engineering , paleontology , sediment , biology
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom