Composition and Thickness Uniformity of Chemical Vapor Deposited Barium Strontium Titanate Films on a Patterned Structure | Zendy

Junghyun Lee | Zendy; ShiWoo Rhee | Zendy

Open Access

Composition and Thickness Uniformity of Chemical Vapor Deposited Barium Strontium Titanate Films on a Patterned Structure

Author(s) -

Junghyun Lee,

ShiWoo Rhee

Publication year - 2001

Publication title -

electrochemical and solid-state letters

Language(s) - English

Resource type - Journals

eISSN - 1944-8775

pISSN - 1099-0062

DOI - 10.1149/1.1344282

Subject(s) - materials science , titanium , deposition (geology) , chemical vapor deposition , strontium , strontium titanate , trench , analytical chemistry (journal) , barium , chemical engineering , hybrid physical chemical vapor deposition , barium titanate , chemical composition , thin film , mineralogy , nanotechnology , composite material , combustion chemical vapor deposition , metallurgy , ceramic , carbon film , chemistry , environmental chemistry , organic chemistry , engineering , paleontology , layer (electronics) , sediment , biology

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