Chemical Structural Analysis of Diamondlike Carbon Films with Different Electrical Resistivities by X-ray Photoelectron Spectroscopy
Author(s) -
Susumu Takabayashi,
Keishi Okamoto,
K. Shimada,
Kunihiko Motomitsu,
Hiroaki Motoyama,
Tatsuyuki Nakatani,
Hiroyuki Sakaue,
Hitoshi Suzuki,
Takayuki Takahagi
Publication year - 2008
Publication title -
japanese journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.487
H-Index - 129
eISSN - 1347-4065
pISSN - 0021-4922
DOI - 10.1143/jjap.47.3376
Subject(s) - x ray photoelectron spectroscopy , carbon fibers , hydrogen , carbon film , electrical resistivity and conductivity , binding energy , materials science , chemical bond , analytical chemistry (journal) , chemical shift , sputter deposition , chemistry , sputtering , thin film , nanotechnology , atomic physics , chemical engineering , organic chemistry , composite material , physics , electrical engineering , composite number , engineering
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