Radial Diffusion of Negative Ions Produced by Magnetized String-Type CF4Plasma | Zendy

M. Abid Imtiaz | Zendy; Tetsu Mieno | Zendy

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Radial Diffusion of Negative Ions Produced by Magnetized String-Type CF₄Plasma

Author(s) -

M. Abid Imtiaz,

Tetsu Mieno

Publication year - 2007

Publication title -

japanese journal of applied physics

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.487

H-Index - 129

eISSN - 1347-4065

pISSN - 0021-4922

DOI - 10.1143/jjap.46.382

Subject(s) - plasma , ion , langmuir probe , chemistry , diffusion , atomic physics , plasma diffusion , analytical chemistry (journal) , plasma diagnostics , physics , chromatography , thermodynamics , nuclear physics , organic chemistry

Fluorine negative ions (F-) produced by a column-type magnetized plasma with CF4 gas diffuse radially and accumulate around the plasma column. To explain the features of this accumulation, the radial profiles of the negative-ion density n- as functions of discharge parameters are measured using a hot-wire-type Langmuir probe. The modified Bohm theory is applied to evaluate n- as n-/ne>2 and the negative ions are well confined between two end plates. n- around the plasma column decreases with increasing magnetic field from 0.01 to 0.15 T. With increasing pressure from 0.25 to 1.1 Pa, n- around the plasma column gradually decreases.

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