On-chip and freestanding elastic carbon films for micro-supercapacitors | Zendy

Peihua Huang | Zendy; Christophe Lethien | Zendy; S. Pinaud | Zendy; Kévin Brousse | Zendy; R. Laloo | Zendy; Viviane Turq | Zendy; M. Respaud | Zendy; Arnaud Demortière | Zendy; Barbara Daffos | Zendy; PierreLouis Taberna | Zendy; Bruno Chaudret | Zendy; Yury Gogotsi | Zendy; Patrice Simon | Zendy

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On-chip and freestanding elastic carbon films for micro-supercapacitors

Author(s) -

Peihua Huang,

Christophe Lethien,

S. Pinaud,

Kévin Brousse,

R. Laloo,

Viviane Turq,

M. Respaud,

Arnaud Demortière,

Barbara Daffos,

PierreLouis Taberna,

Bruno Chaudret,

Yury Gogotsi,

Patrice Simon

Publication year - 2016

Publication title -

science

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 12.556

H-Index - 1186

eISSN - 1095-9203

pISSN - 0036-8075

DOI - 10.1126/science.aad3345

Subject(s) - supercapacitor , microfabrication , materials science , electronics , layer (electronics) , carbon fibers , nanotechnology , capacitor , flexible electronics , optoelectronics , composite material , capacitance , fabrication , electrical engineering , electrode , voltage , composite number , chemistry , engineering , medicine , alternative medicine , pathology

Integration of electrochemical capacitors with silicon-based electronics is a major challenge, limiting energy storage on a chip. We describe a wafer-scale process for manufacturing strongly adhering carbide-derived carbon films and interdigitated micro-supercapacitors with embedded titanium carbide current collectors, fully compatible with current microfabrication and silicon-based device technology. Capacitance of those films reaches 410 farads per cubic centimeter/200 millifarads per square centimeter in aqueous electrolyte and 170 farads per cubic centimeter/85 millifarads per square centimeter in organic electrolyte. We also demonstrate preparation of self-supported, mechanically stable, micrometer-thick porous carbon films with a Young's modulus of 14.5 gigapascals, with the possibility of further transfer onto flexible substrates. These materials are interesting for applications in structural energy storage, tribology, and gas separation.

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