Open AccessSelf-aligned patterning technique for fabricating high-performance diamond sensor arrays with nanoscale precision
Author(s) -
Mengqi Wang,
Haoyu Sun,
Xiangyu Ye,
Pei Yu,
Hangyu Liu,
Jingwei Zhang,
Pengfei Wang,
Fazhan Shi,
Ya Wang,
Jiangfeng Du
Publication year - 2022
Publication title -
science advances
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 5.928
H-Index - 146
ISSN - 2375-2548
DOI - 10.1126/sciadv.abn9573
Subject(s) - materials science , diamond , nanopillar , photonics , quantum sensor , optoelectronics , nanoscopic scale , nanotechnology , sensitivity (control systems) , scalability , quantum , computer science , electronic engineering , quantum information , nanostructure , quantum network , physics , quantum mechanics , database , engineering , composite material