Monolithic mtesla-level magnetic induction by self-rolled-up membrane technology | Zendy

Wen Huang | Zendy; Zhendong Yang | Zendy; Mark Kraman | Zendy; Qingyi Wang | Zendy; Zihao Ou | Zendy; Miguel Muñoz Rojo | Zendy; Ananth Saran Yalamarthy | Zendy; Victoria Chen | Zendy; Feifei Lian | Zendy; Jimmy H. Ni | Zendy; Siyu Liu | Zendy; Haotian Yu | Zendy; Lei Sang | Zendy; Julian A. Michaels | Zendy; Dane J. Sievers | Zendy; J. G. Eden | Zendy; Paul V. Braun | Zendy; Qian Chen | Zendy; Songbin Gong | Zendy; Debbie G. Senesky | Zendy; Eric Pop | Zendy; Xiuling Li | Zendy

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Monolithic mtesla-level magnetic induction by self-rolled-up membrane technology

Author(s) -

Wen Huang,

Zhendong Yang,

Mark Kraman,

Qingyi Wang,

Zihao Ou,

Miguel Muñoz Rojo,

Ananth Saran Yalamarthy,

Victoria Chen,

Feifei Lian,

Jimmy H. Ni,

Siyu Liu,

Haotian Yu,

Lei Sang,

Julian A. Michaels,

Dane J. Sievers,

J. G. Eden,

Paul V. Braun,

Qian Chen,

Songbin Gong,

Debbie G. Senesky,

Eric Pop,

Xiuling Li

Publication year - 2020

Publication title -

science advances

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 5.928

H-Index - 146

ISSN - 2375-2548

DOI - 10.1126/sciadv.aay4508

Subject(s) - ferrofluid , electromagnetic coil , magnetic flux , materials science , magnetic core , membrane , electromagnetic induction , magnetic field , nanotechnology , nuclear magnetic resonance , physics , chemistry , engineering , electrical engineering , quantum mechanics , biochemistry

Monolithic strong magnetic induction at the mtesla to tesla level provides essential functionalities to physical, chemical, and medical systems. Current design options are constrained by existing capabilities in three-dimensional (3D) structure construction, current handling, and magnetic material integration. We report here geometric transformation of large-area and relatively thick (~100 to 250 nm) 2D nanomembranes into multiturn 3D air-core microtubes by a vapor-phase self-rolled-up membrane (S-RuM) nanotechnology, combined with postrolling integration of ferrofluid magnetic materials by capillary force. Hundreds of S-RuM power inductors on sapphire are designed and tested, with maximum operating frequency exceeding 500 MHz. An inductance of 1.24 μH at 10 kHz has been achieved for a single microtube inductor, with corresponding areal and volumetric inductance densities of 3 μH/mm and 23 μH/mm, respectively. The simulated intensity of the magnetic induction reaches tens of mtesla in fabricated devices at 10 MHz.

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