Open AccessQuality-factor and frequency shifts of suspended Ge membranes
Author(s) -
Leiqing Zhou,
Gerard Colston,
O. Trushkevych,
M. Myronov,
D. R. Leadley,
R. S. Edwards
Publication year - 2017
Publication title -
proceedings of meetings on acoustics
Language(s) - English
Resource type - Conference proceedings
ISSN - 1939-800X
DOI - 10.1121/2.0000751
Subject(s) - membrane , materials science , microelectronics , temperature cycling , silicon , substrate (aquarium) , stress (linguistics) , residual stress , composite material , optoelectronics , thermal , chemistry , thermodynamics , physics , biochemistry , oceanography , linguistics , philosophy , geology
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