A monolithic three-dimensional thermal convective acoustic vector sensor with acoustic-transparent heat sink | Zendy

Xiangyuan Xu | Zendy; Hao Ge | Zendy; Jing Zhao | Zendy; Zhifei Chen | Zendy; Jun Zhang | Zendy; MingHui Lu | Zendy; Ming Bao | Zendy; YanFeng Chen | Zendy; Xiaodong Li | Zendy

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A monolithic three-dimensional thermal convective acoustic vector sensor with acoustic-transparent heat sink

Author(s) -

Xiangyuan Xu,

Hao Ge,

Jing Zhao,

Zhifei Chen,

Jun Zhang,

MingHui Lu,

Ming Bao,

YanFeng Chen,

Xiaodong Li

Publication year - 2022

Publication title -

jasa express letters

Language(s) - English

Resource type - Journals

ISSN - 2691-1191

DOI - 10.1121/10.0010275

Subject(s) - heat sink , microelectromechanical systems , planar , acoustics , thermal , materials science , convection , velocity vector , sink (geography) , convective heat transfer , particle velocity , mechanical engineering , optoelectronics , computer science , engineering , mechanics , physics , aerospace engineering , computer graphics (images) , cartography , meteorology , geography

An acoustic vector sensor can directly detect acoustic particle velocity based on the measured temperature difference between closely spaced heated wires. For the detection of velocity in three dimensions, an integrated three-dimensional (3 D) sensor is desired, but it remains challenging in MEMS (Micro-Electro-Mechanical System) manufacturing. Here, a novel monolithic 3 D acoustic vector sensor is proposed, which is constructed using in-plane distributed wires assembled with acoustically transparent heat sink. The planar MEMS structure of the proposed sensor makes it easy to be fabricated and packaged. This work offers a new method for the design of acoustic vector sensors and other thermal convection-based MEMS sensors.

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