Open AccessInvestigation of Lamb waves for sensor applications in semiconductor processing
Author(s) -
F. Levent Degertekin,
Victor Honein,
B.T. Khuri-Yakub
Publication year - 1994
Publication title -
the journal of the acoustical society of america
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.619
H-Index - 187
eISSN - 1520-8524
pISSN - 0001-4966
DOI - 10.1121/1.410620
Subject(s) - materials science , wafer , lamb waves , silicon , semiconductor , thin film , ultrasonic sensor , acoustics , optics , sensitivity (control systems) , optoelectronics , phase velocity , wave propagation , electronic engineering , physics , nanotechnology , engineering
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