Open AccessAcoustic silicon sensors
Author(s) -
G. M. Sessler
Publication year - 1994
Publication title -
the journal of the acoustical society of america
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.619
H-Index - 187
eISSN - 1520-8524
pISSN - 0001-4966
DOI - 10.1121/1.409402
Subject(s) - piezoresistive effect , amplifier , microphone , materials science , biasing , chip , transimpedance amplifier , electronics , transistor , silicon , acoustics , transducer , microelectromechanical systems , optoelectronics , modulation (music) , electrical engineering , computer science , electronic engineering , voltage , operational amplifier , telecommunications , engineering , cmos , physics , sound pressure
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