Open AccessEvolution of the scanning microscopes both for imaging and lithography
Author(s) -
C. F. Quate
Publication year - 1993
Publication title -
the journal of the acoustical society of america
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.619
H-Index - 187
eISSN - 1520-8524
pISSN - 0001-4966
DOI - 10.1121/1.407842
Subject(s) - microscope , wafer , scanning hall probe microscope , scanning electron microscope , materials science , optics , lithography , scanning probe microscopy , nanotechnology , magnetic force microscope , optical microscope , conventional transmission electron microscope , optoelectronics , scanning transmission electron microscopy , physics , magnetic field , magnetization , quantum mechanics
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