Open AccessElectric micromotors on silicon
Author(s) -
Mehran Mehregany
Publication year - 1992
Publication title -
the journal of the acoustical society of america
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.619
H-Index - 187
eISSN - 1520-8524
pISSN - 0001-4966
DOI - 10.1121/1.404911
Subject(s) - fabrication , materials science , wafer , surface micromachining , comb drive , rotor (electric) , optoelectronics , silicon , stator , silicon nitride , bulk micromachining , actuator , electrical engineering , medicine , alternative medicine , pathology , engineering
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