Open AccessNoise control in microelectronics clean rooms
Author(s) -
Colin G. Gordon,
Amir M. Yazdanniyaz
Publication year - 1989
Publication title -
the journal of the acoustical society of america
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.619
H-Index - 187
eISSN - 1520-8524
pISSN - 0001-4966
DOI - 10.1121/1.2027157
Subject(s) - microelectronics , noise (video) , noise control , control (management) , computer science , cleanroom , space (punctuation) , sort , acoustics , sound (geography) , environmental science , electrical engineering , engineering , noise reduction , materials science , nanotechnology , physics , artificial intelligence , information retrieval , image (mathematics) , operating system
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