Electroacoustic mathematical model of a capacitive solid-state microphone structure
Author(s) -
John C. Baumhauer
Publication year - 1987
Publication title -
the journal of the acoustical society of america
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.619
H-Index - 187
eISSN - 1520-8524
pISSN - 0001-4966
DOI - 10.1121/1.2024458
Subject(s) - diaphragm (acoustics) , microphone , materials science , acoustics , biasing , sensitivity (control systems) , capacitive sensing , voltage , microelectromechanical systems , vibration , surface micromachining , noise (video) , signal (programming language) , resistive touchscreen , spice , electrical engineering , optoelectronics , electronic engineering , computer science , fabrication , sound pressure , engineering , physics , medicine , alternative medicine , image (mathematics) , pathology , artificial intelligence , programming language
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