Open AccessDetecting large particles in a slurry by measuring acoustic cavitation thresholds
Author(s) -
Sameer I. Madanshetty,
Hang Ji
Publication year - 2004
Publication title -
acoustics research letters online
Language(s) - English
Resource type - Journals
ISSN - 1529-7853
DOI - 10.1121/1.1779673
Subject(s) - chemical mechanical planarization , wafer , cavitation , slurry , materials science , polishing , acoustics , particle (ecology) , composite material , nanotechnology , physics , oceanography , geology
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