A Review of Metalorganic Chemical Vapor Deposition of High-Temperature Superconducting Thin Films
Author(s) -
A. Erbil,
K. Zhang,
B. S. Kwak,
E. P. Boyd
Publication year - 1990
Publication title -
proceedings of spie, the international society for optical engineering/proceedings of spie
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.192
H-Index - 176
eISSN - 1996-756X
pISSN - 0277-786X
DOI - 10.1117/12.965153
Subject(s) - metalorganic vapour phase epitaxy , chemical vapor deposition , thin film , materials science , deposition (geology) , combustion chemical vapor deposition , superconductivity , process (computing) , optoelectronics , hybrid physical chemical vapor deposition , carbon film , chemical engineering , nanotechnology , computer science , epitaxy , condensed matter physics , physics , engineering , layer (electronics) , paleontology , sediment , biology , operating system
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