Open AccessStatistical And Signal Processing Concepts In Surface Metrology
Author(s) -
E. L. Church,
Peter Z. Takacs
Publication year - 1986
Publication title -
proceedings of spie, the international society for optical engineering/proceedings of spie
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.192
H-Index - 176
eISSN - 1996-756X
pISSN - 0277-786X
DOI - 10.1117/12.964495
Subject(s) - metrology , surface finish , surface roughness , computer science , surface metrology , bidirectional reflectance distribution function , statistical model , electronic engineering , optics , mechanical engineering , engineering , artificial intelligence , physics , reflectivity , profilometer , quantum mechanics
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