Silicon-Etalon Fiber-Optic Temperature Sensor | Zendy

Glenn M. Beheim | Zendy; Klaus Fritsch | Zendy; Joseph M. Flatico | Zendy; Massood TabibAzar | Zendy

AI Assistant Blog Pricing

Home ZAIA Blog

Open Access

Silicon-Etalon Fiber-Optic Temperature Sensor

Author(s) -

Glenn M. Beheim,

Klaus Fritsch,

Joseph M. Flatico,

Massood TabibAzar

Publication year - 1990

Publication title -

proceedings of spie, the international society for optical engineering/proceedings of spie

Language(s) - English

Resource type - Conference proceedings

SCImago Journal Rank - 0.192

H-Index - 176

eISSN - 1996-756X

pISSN - 0277-786X

DOI - 10.1117/12.963069

Subject(s) - fabry–pérot interferometer , materials science , fiber optic sensor , optical fiber , silicon , cable gland , optoelectronics , optics , temperature measurement , wavelength , fiber , electrical engineering , composite material , engineering , physics , quantum mechanics

A temperature sensor is described which consists of a silicon etalon that is sputtered directly onto the end of an optical fiber. A two-layer protective cap structure is used to improve the sensor's long-term stability. The sensor's output is wavelength encoded to provide a high degree of immunity from cable and connector effects. This sensor is extremely compact and potentially inexpensive.

The content you want is available to Zendy users.

Already have an account? Click here to sign in.

Having issues? You can contact us here

Accelerating Research