Surface Topography Measurements Over The 1 Meter To 10 Micrometer Spatial Period Bandwidth
Author(s) -
Peter Z. Takacs,
Karen Furenlid,
Robert A. DeBiasse,
E. L. Church
Publication year - 1989
Publication title -
proceedings of spie, the international society for optical engineering/proceedings of spie
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.192
H-Index - 176
eISSN - 1996-756X
pISSN - 0277-786X
DOI - 10.1117/12.962824
Subject(s) - optics , surface roughness , surface finish , radius of curvature , spatial frequency , materials science , wavelength , profilometer , radius , curvature , physics , remote sensing , computer science , geology , mathematics , geometry , mean curvature , mean curvature flow , composite material , computer security
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