Improve Fourier transform profilometry by locally area modulating squared binary structured pattern | Zendy

William Lohry | Zendy; Song Zhang | Zendy

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Improve Fourier transform profilometry by locally area modulating squared binary structured pattern

Author(s) -

William Lohry,

Song Zhang

Publication year - 2012

Publication title -

proceedings of spie, the international society for optical engineering/proceedings of spie

Language(s) - English

Resource type - Conference proceedings

SCImago Journal Rank - 0.192

H-Index - 176

eISSN - 1996-756X

pISSN - 0277-786X

DOI - 10.1117/12.927439

Subject(s) - harmonics , binary number , fourier transform , profilometer , computer science , transformation (genetics) , harmonic analysis , algorithm , electronic engineering , mathematics , materials science , engineering , mathematical analysis , electrical engineering , biochemistry , chemistry , arithmetic , voltage , surface roughness , composite material , gene

Our recent study found that it is very difficult to use the binary defocusing technique to completely suppress the 3rd-order harmonics, and thus it is challenging to achieve high-quality three-dimensional (3-D) measurement with the Fourier transformation method. This paper presents a novel approach to effectively eliminate the 3rd order harmonics by modulating the binary structured patterns in both x and y directions. Both simulation and experimental results will be presented to verify the performance of the proposed technique.

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