Open AccessStress engineering for free-standing SU-8 2002 thin film devices
Author(s) -
Kyle Oliver,
Sarah J. Lukes,
Mohammad J. Moghimi,
David L. Dickensheets
Publication year - 2012
Publication title -
proceedings of spie, the international society for optical engineering/proceedings of spie
Language(s) - Uncategorized
Resource type - Conference proceedings
SCImago Journal Rank - 0.192
H-Index - 176
eISSN - 1996-756X
pISSN - 0277-786X
DOI - 10.1117/12.910967
Subject(s) - stress (linguistics) , materials science , thin film , engineering physics , electrical engineering , optoelectronics , engineering , nanotechnology , philosophy , linguistics
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