Optofluidics: waveguides and devices | Zendy

Genni Testa | Zendy; Yujian Huang | Zendy; Luigi Zeni | Zendy; P.M. Sarro | Zendy; Romeo Bernini | Zendy

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Optofluidics: waveguides and devices

Author(s) -

Genni Testa,

Yujian Huang,

Luigi Zeni,

P.M. Sarro,

Romeo Bernini

Publication year - 2012

Publication title -

proceedings of spie, the international society for optical engineering/proceedings of spie

Language(s) - English

Resource type - Conference proceedings

SCImago Journal Rank - 0.192

H-Index - 176

eISSN - 1996-756X

pISSN - 0277-786X

DOI - 10.1117/12.908683

Subject(s) - optofluidics , astronomical interferometer , waveguide , interferometry , resonator , silicon photonics , silicon , optoelectronics , whispering gallery wave , optics , materials science , photonics , silicon on insulator , microfluidics , physics , nanotechnology

In this work we review recent results of our work on optofluidics. We show that single mode optofluidic waveguides with low loss can be realized using antiresonant reflecting optical confinement (ARROW). These waveguides can be fabricated using full standard silicon technology or hybrid silicon-polymer processes. ARROW waveguides have been used in order to realize complex optofluidic devices like Mach-Zehnder interferometers and ring resonators. The advantage of using optofluidic waveguide results in very compact devices with a total length of 2.5 mm and a required liquid volume less then 0.16nl.MicroelectronicsElectrical Engineering, Mathematics and Computer Scienc

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