Open AccessHigh aspect ratio taper-free micro and nano-channel fabrication in glass with ultrafast nondiffracting Bessel beams
Author(s) -
François Courvoisier,
M. K. Bhuyan,
Maxime Jacquot,
P.-A. Lacourt,
Roland Salut,
Luca Furfaro,
John M. Dudley
Publication year - 2011
Publication title -
proceedings of spie, the international society for optical engineering/proceedings of spie
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.192
H-Index - 176
eISSN - 1996-756X
pISSN - 0277-786X
DOI - 10.1117/12.875409
Subject(s) - femtosecond , ultrashort pulse , bessel function , fabrication , materials science , aspect ratio (aeronautics) , dielectric , nano , optics , bessel beam , laser , optoelectronics , nanotechnology , physics , composite material , medicine , alternative medicine , pathology
International audienceUltrafast laser pulses are a powerful tool to process dielectrics. Here, we review our recent work concerning high aspect ratio micro and nanochannel processing in glass. We show how femtosecond Bessel beams overcome many of the difficulties associated with Gaussian beams. We report on single shot processing of nanochannels with aspect ratio up to 100. Underlying physical phenomena are discussed
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