Open AccessMEMS generator of power harvesting by vibrations using piezoelectric cantilever beam with digitate electrode
Author(s) -
Bor-Shun Lee,
Jyun-Jhang He,
Wen-Jong Wu,
WenPin Shih
Publication year - 2006
Publication title -
proceedings of spie, the international society for optical engineering/proceedings of spie
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.192
H-Index - 176
eISSN - 1996-756X
pISSN - 0277-786X
DOI - 10.1117/12.658584
Subject(s) - microelectromechanical systems , piezoelectricity , materials science , lead zirconate titanate , energy harvesting , cantilever , pmut , beam (structure) , wafer , vibration , optoelectronics , nanogenerator , acoustics , electrical engineering , power (physics) , engineering , composite material , dielectric , ferroelectricity , structural engineering , physics , quantum mechanics
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