Nano-interconnection for microelectronics and polymers with benzo-triazole | Zendy

Yeonjoon Park | Zendy; Sang H. Choi | Zendy; Hyunpil Noh | Zendy; Young Kuk | Zendy

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Nano-interconnection for microelectronics and polymers with benzo-triazole

Author(s) -

Yeonjoon Park,

Sang H. Choi,

Hyunpil Noh,

Young Kuk

Publication year - 2006

Publication title -

proceedings of spie, the international society for optical engineering/proceedings of spie

Language(s) - English

Resource type - Conference proceedings

SCImago Journal Rank - 0.192

H-Index - 176

eISSN - 1996-756X

pISSN - 0277-786X

DOI - 10.1117/12.657760

Subject(s) - microelectronics , materials science , photoemission spectroscopy , scanning tunneling microscope , silicon , polymer , x ray photoelectron spectroscopy , wafer , polymerization , optoelectronics , nanotechnology , chemical engineering , composite material , engineering

Benzo-Triazole (BTA) is considered as an important bridging material that can connect an organic polymer to the metal electrode on silicon wafers as a part of the microelectronics fabrication technology. We report a detailed process of surface induced 3-D polymerization of BTA on the Cu electrode material which was measured with the Ultraviolet Photoemission Spectroscopy (UPS), X-ray Photoemission Spectroscopy (XPS), and Scanning Tunneling Microscope (STM). The electric utilization of shield and chain polymerization of BTA on Cu surface is contemplated in this study.

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