<title>3D inspection by conical wavefronts</title>
Author(s) -
Л.М. Сороко
Publication year - 2002
Publication title -
proceedings of spie, the international society for optical engineering/proceedings of spie
Language(s) - Uncategorized
Resource type - Conference proceedings
SCImago Journal Rank - 0.192
H-Index - 176
eISSN - 1996-756X
pISSN - 0277-786X
DOI - 10.1117/12.484561
Subject(s) - optics , optical axis , conical surface , microscope , wavefront , lens (geology) , optical microscope , line (geometry) , computer science , perpendicular , physics , computer vision , artificial intelligence , geometry , scanning electron microscope , mathematics
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