Reducing the mechanical hysteresis problem in optically addressed diaphragm pressure sensors | Zendy

Seyedmehdi Sharifian | Zendy; David Buttsworth | Zendy

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<title>Reducing the mechanical hysteresis problem in optically addressed diaphragm pressure sensors</title>

Author(s) -

Seyedmehdi Sharifian,

David Buttsworth

Publication year - 2002

Publication title -

proceedings of spie, the international society for optical engineering/proceedings of spie

Language(s) - English

Resource type - Conference proceedings

SCImago Journal Rank - 0.192

H-Index - 176

eISSN - 1996-756X

pISSN - 0277-786X

DOI - 10.1117/12.468141

Subject(s) - hysteresis , diaphragm (acoustics) , deflection (physics) , interferometry , materials science , electronic engineering , computer science , acoustics , engineering , physics , optics , vibration , quantum mechanics

Mechanical hysteresis problems associated with pressure sensors based on interferometric measurements of diaphragm deflection are discussed. The source and importance of each contribution to the net hysteresis is calculated and compared with experimental results. Possible methods to decrease hysteresis effects are presented. Based on these suggested methods, new sensors have been manufactured and their hysteresis evaluated. The results demonstrate that significant reductions in hysteresis can be achieved with minimum cost. Future sensor development will focus on materials selection and manufacturing methods to fully realize these improvements.\ud\u

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