Open AccessNormal incidence multilayer telescope for soft X-ray beam expander
Author(s) -
Hideyo Kunieda,
Kazutami Misaki,
Yoshito Haba,
M. Ishida,
Kei Itoh,
Hideyuki Mori,
Ryo Shibata
Publication year - 2003
Publication title -
proceedings of spie, the international society for optical engineering/proceedings of spie
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.192
H-Index - 176
eISSN - 1996-756X
pISSN - 0277-786X
DOI - 10.1117/12.461513
Subject(s) - optics , extreme ultraviolet lithography , telescope , x ray optics , cassegrain reflector , physics , beam (structure) , wavelength , scattering , focal length , materials science , lens (geology) , x ray
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