Open Access<title>McCarter superfinish grinding for silicon: an update</title>
Author(s) -
Frank M. Anthony,
Ali M. Khounsary,
Douglas R. McCarter,
Szczesny Kraśnicki,
Matt Tangedahl
Publication year - 2001
Publication title -
proceedings of spie, the international society for optical engineering/proceedings of spie
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.192
H-Index - 176
eISSN - 1996-756X
pISSN - 0277-786X
DOI - 10.1117/12.411655
Subject(s) - grinding , flatness (cosmology) , materials science , silicon , surface roughness , diamond , polishing , surface finish , etching (microfabrication) , diffraction , substrate (aquarium) , diamond grinding , optics , optoelectronics , composite material , grinding wheel , layer (electronics) , physics , oceanography , cosmology , quantum mechanics , geology
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