Open Access<title>X-ray zone plate fabrication using a focused ion beam</title>
Author(s) -
P. Ilinski,
Barry Lai,
Neil Bassom,
Jason Donald,
Gregory J. Athas
Publication year - 2001
Publication title -
proceedings of spie, the international society for optical engineering/proceedings of spie
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.192
H-Index - 176
eISSN - 1996-756X
pISSN - 0277-786X
DOI - 10.1117/12.411652
Subject(s) - materials science , focused ion beam , wafer , sputtering , zone plate , micrometer , transmission electron microscopy , silicon , fabrication , optoelectronics , lithography , ion milling machine , optics , ion , nanotechnology , thin film , diffraction , medicine , physics , alternative medicine , pathology , quantum mechanics , layer (electronics)
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