Open AccessFabrication of diffractive optical elements using the CMOS process
Author(s) -
Hunglin Chen,
Huiwen Huang,
Kaihsiang Yen,
Jinhung Chio,
ChingLiang Dai,
Chienliu Chang,
PeiZen Chang
Publication year - 2000
Publication title -
proceedings of spie, the international society for optical engineering/proceedings of spie
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.192
H-Index - 176
eISSN - 1996-756X
pISSN - 0277-786X
DOI - 10.1117/12.392197
Subject(s) - microfabrication , diffraction efficiency , cmos , diffraction , fabrication , diffraction grating , process (computing) , computer science , materials science , optoelectronics , optics , wavelength , grating , physics , medicine , alternative medicine , pathology , operating system
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