Open Access<title>Novel fabrication and simple hybridization of exotic material MEMS</title>
Author(s) -
Slobodan Rajic,
Panos G. Datskos,
Irene Datskou
Publication year - 1999
Publication title -
proceedings of spie, the international society for optical engineering/proceedings of spie
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.192
H-Index - 176
eISSN - 1996-756X
pISSN - 0277-786X
DOI - 10.1117/12.361221
Subject(s) - microelectromechanical systems , fabrication , semiconductor , materials science , electronics , silicon , nanotechnology , computer science , optoelectronics , electrical engineering , medicine , alternative medicine , engineering , pathology
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