Open Access<title>Development and testing of an active platen for IC manufacturing</title>
Author(s) -
James M. Redmond,
P. Barney,
Tony G. Smith,
Joel R. Darnold
Publication year - 1998
Publication title -
proceedings of spie, the international society for optical engineering/proceedings of spie
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.192
H-Index - 176
eISSN - 1996-756X
pISSN - 0277-786X
DOI - 10.1117/12.324353
Subject(s) - actuator , settling time , wafer , computer science , vibration , bandwidth (computing) , electrical engineering , engineering , acoustics , control engineering , physics , telecommunications , step response , artificial intelligence
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