A hinged-pad test structure for sliding friction measurement in micromachining | Zendy

Maarten P. Boer | Zendy; James M. Redmond | Zendy; Terry A. Michalské | Zendy

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A hinged-pad test structure for sliding friction measurement in micromachining

Author(s) -

Maarten P. Boer,

James M. Redmond,

Terry A. Michalské

Publication year - 1998

Publication title -

proceedings of spie, the international society for optical engineering/proceedings of spie

Language(s) - English

Resource type - Conference proceedings

SCImago Journal Rank - 0.192

H-Index - 176

eISSN - 1996-756X

pISSN - 0277-786X

DOI - 10.1117/12.324066

Subject(s) - hinge , cantilever , microelectromechanical systems , surface micromachining , fabrication , materials science , slip (aerodynamics) , structural engineering , mechanical engineering , mechanics , acoustics , engineering , composite material , nanotechnology , physics , medicine , alternative medicine , pathology , aerospace engineering

We describe the design, modeling, fabrication and initial testing of a new test structure for friction measurement in MEMS. The device consists of a cantilevered forked beam and a friction pad attached via a hinge. Compared to previous test structures, the proposed structure can measure friction over much larger pressure ranges, yet occupies ten to one hundred times less area. The placement of the hinge is crucial to obtaining a well-known and constant pressure distribution in the device. Static deflections on the device were measured and modeled numerically. Preliminary results indicate that friction pad slip is sensitive to friction pad normal force.

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