Open Access<title>Combined photonics and MEMS function demonstration</title>
Author(s) -
Olga Blum-Spahn,
Mial E. Warren,
Hong Q. Hou,
Richard F. Carson,
Kent D. Choquette,
M.S. Rodgers,
Jeffry J. Sniegowski
Publication year - 1998
Publication title -
proceedings of spie, the international society for optical engineering/proceedings of spie
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.192
H-Index - 176
eISSN - 1996-756X
pISSN - 0277-786X
DOI - 10.1117/12.305469
Subject(s) - photonics , computer science , microelectromechanical systems , function (biology) , optoelectronics , physics , biology , evolutionary biology
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