<title>Adaptation of the fuzzy k-nearest neighbor classifier for manufacturing automation</title>

The use of supervised pattern recognition technologies for automation in the manufacturing environment requires the development of systems that are easy to train and use. In general, these systems attempt to emulate an inspection or measurement function typically performed by a manufacturing engineer or technician. This paper describes a self-optimizing classification system for automatic decision making in the manufacturing environment. This classification system identifies and labels unique distributions of product defects denoted as "signatures". The technique relies on encapsulating human experience through a teaching method to emulate the human response to various manufacturing situations. This has been successfully accomplished through the adaptation and extension of a feature-based, fuzzy k-nearest neighbor (k-NN) classifier that has been implemented in a pair-wise fashion. The classifier works with pair-wise combinations of the user- defined classes so that a significant reduction in feature space and problem complexity can be achieved. This k-NN implementation makes extensive use of hold-one-out results and fuzzy ambiguity information to optimize its performance. A semiconductor manufacturing case study will be presented. The technique uses data collected from in-line optical inspection tools to interpret and rapidly identify characteristic signatures that are uniquely associated with the manufacturing process. The system then alerts engineers to probable yield-limiting conditions that require attention.