Open Access<title>Progress in silicon-to-silicon direct bonding and its application to synchrotron x-ray optics</title>
Author(s) -
T. Graber,
Szczesny Kraśnicki,
P. B. Fernandez,
Dennis M. Mills,
QinYi Tong,
Ulrich Goesele
Publication year - 1997
Publication title -
proceedings of spie, the international society for optical engineering/proceedings of spie
Language(s) - English
Resource type - Conference proceedings
SCImago Journal Rank - 0.192
H-Index - 176
eISSN - 1996-756X
pISSN - 0277-786X
DOI - 10.1117/12.294498
Subject(s) - silicon , direct bonding , materials science , wafer , anodic bonding , wafer bonding , hybrid silicon laser , optoelectronics , wire bonding , optics , electrical engineering , physics , chip , engineering
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